Analysis of 3-panel and 4-panel microscale ionization sources
نویسندگان
چکیده
منابع مشابه
Analysis of 3-panel and 4-panel microscale ionization sources
Two designs of a microscale electron ionization EI source are analyzed herein: a 3-panel design and a 4-panel design. Devices were fabricated using microelectromechanical systems technology. Field emission from carbon nanotube provided the electrons for the EI source. Ion currents were measured for helium, nitrogen, and xenon at pressures ranging from 10−4 to 0.1 Torr. A comparison of the perfo...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2010
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.3429220